Classification of clean rooms

1. Chaotic flow: Air enters the clean room from the air conditioner chassis through the air duct and the air filter in the clean room, and is returned by the return air column or the elevated floor in the clean room. An air stream is an irregular state of turbulence or eddy current. This type is suitable for clean room grades: 1000-100000

2. Stratification flow: the air flow moves into a uniform straight shape, the air enters the room by the filter coverage, and the air is returned by the elevated floor or the return air column on both sides. This type is suitable for the relatively high level clean room

3. Compound type: The compound type is the combination or combination of chaotic flow and stratified flow, which can provide local ultra-clean air. The clean tunnel uses HEPA or ULPA filter to cover 100% of the process area or working area to improve the cleanliness level to more than 10, which can save installation and operation costs. This mode isolates the work area of the operator from the maintenance of the product and machine to avoid the impact of machine maintenance on work and quality. Most ULSI processes use this mode