Basic and special parameters of clean room

1. The cleanliness

Cleanliness is the most important and basic technical index of clean room, its unit is: the number of particles with particle size not larger than a certain scale in the air per unit volume. Microelectronics industry has the highest requirement for cleanliness, followed by optoelectronics industry.

2. Microbial concentration

Microbial concentration is another important technical index of clean room, its unit is: the number of microorganisms in the air per unit volume. Bioengineering industry has the highest requirements for microbial concentration, followed by medical, pharmaceutical, food, beverage, cosmetics and other industries. There are many kinds of microorganisms, including viruses, bacteria, fungi, algae, spores, pollen, mites and so on. The microbes in the air are part of the particles in the air, or rather the more harmful part. The usual measure is the concentration of bacteria in the air.

3 the temperature

Temperature is the basic working condition, almost all clean rooms have clear requirements for temperature. Temperature will affect the size of the body, thus affecting the accuracy of processing, so precision processing has quite strict requirements for temperature. Temperature will affect the parameters of the instrument, resulting in measurement error, so precision measuring instruments for high temperature requirements.

4. The humidity

Humidity is also the basic working condition, almost all clean rooms have clear requirements for humidity. Too much humidity will make many substances produce chemical reactions, thereby affecting product quality, and even make equipment failure, product scrap. Too low humidity will dehydrate many substances and lose their original function.

5. Wind speed and volume

Sufficient wind speed and air volume are the guarantee of cleanliness. Excessive wind speed and air volume not only waste energy, but also sometimes affect the normal work.

6. Pressure and differential pressure

Normal air pressure is essential for normal operation. The necessary differential pressure is to control the leaky stomach. In order to ensure cleanliness in the clean room of the microelectronics industry, the air with low cleanliness is not allowed to leak to the area with high cleanliness. Indoor air is not allowed to leak to the outside of the virus laboratory or infection ward.

Noise of 7.

Excessive noise will not only affect normal work, but also affect the health of personnel. Reducing noise is a basic requirement of clean room.

8. Intensity of illumination

Proper illumination is a necessary condition for normal operation.

Three, special parameters of clean room

1. The vibration

Vibration will affect the stability of the instrument and equipment, thus affecting the accuracy of the instrument, but also affect the processing accuracy of the equipment, so some clean rooms need to control the vibration.

2. The electrostatic

Static electricity has many hazards, especially easy to damage the microelectronics components, so the microelectronics industry needs to strictly control static electricity.

3. Concentration of harmful gas

There are many kinds of harmful gases, some will damage human health, and some will affect the quality of products and the qualified rate of products. The concentration of harmful gases needs to be controlled in the clean room.

4. Radiation intensity

X - ray, 7 - ray, electromagnetic wave and other radiation to the human body have greater damage, and sometimes production equipment or products also have damage.